JPH0369238U - - Google Patents
Info
- Publication number
- JPH0369238U JPH0369238U JP13138489U JP13138489U JPH0369238U JP H0369238 U JPH0369238 U JP H0369238U JP 13138489 U JP13138489 U JP 13138489U JP 13138489 U JP13138489 U JP 13138489U JP H0369238 U JPH0369238 U JP H0369238U
- Authority
- JP
- Japan
- Prior art keywords
- detection device
- measured
- camera
- back surface
- polarizing plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims description 5
- 230000010287 polarization Effects 0.000 claims 1
- 238000007689 inspection Methods 0.000 description 1
Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13138489U JPH0369238U (en]) | 1989-11-10 | 1989-11-10 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13138489U JPH0369238U (en]) | 1989-11-10 | 1989-11-10 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0369238U true JPH0369238U (en]) | 1991-07-09 |
Family
ID=31678895
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13138489U Pending JPH0369238U (en]) | 1989-11-10 | 1989-11-10 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0369238U (en]) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2009013887A1 (ja) * | 2007-07-25 | 2009-01-29 | Nikon Corporation | 端部検査装置 |
JP2012132929A (ja) * | 2012-02-07 | 2012-07-12 | Hitachi Information & Control Solutions Ltd | ラベル検査方法及び装置 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6219739A (ja) * | 1985-07-19 | 1987-01-28 | Hitachi Ltd | 検査方法および装置 |
JPS62103548A (ja) * | 1985-10-31 | 1987-05-14 | Dainippon Printing Co Ltd | リ−ドフレ−ムの欠陥検査装置 |
JPH01140075A (ja) * | 1987-11-26 | 1989-06-01 | Tokyo Electron Ltd | テープキャリヤの検査方法 |
-
1989
- 1989-11-10 JP JP13138489U patent/JPH0369238U/ja active Pending
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6219739A (ja) * | 1985-07-19 | 1987-01-28 | Hitachi Ltd | 検査方法および装置 |
JPS62103548A (ja) * | 1985-10-31 | 1987-05-14 | Dainippon Printing Co Ltd | リ−ドフレ−ムの欠陥検査装置 |
JPH01140075A (ja) * | 1987-11-26 | 1989-06-01 | Tokyo Electron Ltd | テープキャリヤの検査方法 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2009013887A1 (ja) * | 2007-07-25 | 2009-01-29 | Nikon Corporation | 端部検査装置 |
JP2012132929A (ja) * | 2012-02-07 | 2012-07-12 | Hitachi Information & Control Solutions Ltd | ラベル検査方法及び装置 |