JPH0369238U - - Google Patents

Info

Publication number
JPH0369238U
JPH0369238U JP13138489U JP13138489U JPH0369238U JP H0369238 U JPH0369238 U JP H0369238U JP 13138489 U JP13138489 U JP 13138489U JP 13138489 U JP13138489 U JP 13138489U JP H0369238 U JPH0369238 U JP H0369238U
Authority
JP
Japan
Prior art keywords
detection device
measured
camera
back surface
polarizing plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13138489U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13138489U priority Critical patent/JPH0369238U/ja
Publication of JPH0369238U publication Critical patent/JPH0369238U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP13138489U 1989-11-10 1989-11-10 Pending JPH0369238U (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13138489U JPH0369238U (en]) 1989-11-10 1989-11-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13138489U JPH0369238U (en]) 1989-11-10 1989-11-10

Publications (1)

Publication Number Publication Date
JPH0369238U true JPH0369238U (en]) 1991-07-09

Family

ID=31678895

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13138489U Pending JPH0369238U (en]) 1989-11-10 1989-11-10

Country Status (1)

Country Link
JP (1) JPH0369238U (en])

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009013887A1 (ja) * 2007-07-25 2009-01-29 Nikon Corporation 端部検査装置
JP2012132929A (ja) * 2012-02-07 2012-07-12 Hitachi Information & Control Solutions Ltd ラベル検査方法及び装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6219739A (ja) * 1985-07-19 1987-01-28 Hitachi Ltd 検査方法および装置
JPS62103548A (ja) * 1985-10-31 1987-05-14 Dainippon Printing Co Ltd リ−ドフレ−ムの欠陥検査装置
JPH01140075A (ja) * 1987-11-26 1989-06-01 Tokyo Electron Ltd テープキャリヤの検査方法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6219739A (ja) * 1985-07-19 1987-01-28 Hitachi Ltd 検査方法および装置
JPS62103548A (ja) * 1985-10-31 1987-05-14 Dainippon Printing Co Ltd リ−ドフレ−ムの欠陥検査装置
JPH01140075A (ja) * 1987-11-26 1989-06-01 Tokyo Electron Ltd テープキャリヤの検査方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009013887A1 (ja) * 2007-07-25 2009-01-29 Nikon Corporation 端部検査装置
JP2012132929A (ja) * 2012-02-07 2012-07-12 Hitachi Information & Control Solutions Ltd ラベル検査方法及び装置

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